Direct drive with the argon fluoride laser as a path to high fusion gain with sub-megajoule laser energy | Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences
Excimer Laser - an overview | ScienceDirect Topics
Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source
Applied Sciences | Free Full-Text | Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces
Applied Spectra Inc. RESOlution-SE 193nm Excimer Laser | AMSEC | Western Washington University
Schematic of the beam delivery system of the 193nm excimer laser. | Download Scientific Diagram
ArF Excimer Laser for 193nm Lithography | Ushio's technology periodical, "Light Edge" | USHIO INC.